Global monopoly of technology

Chapter 580 ["Purple Star" Extreme Ultraviolet Lithography Machine]

On the morning of June 15th, Luo Sheng came to the Côte d'Azur laboratory. The most exciting news for him in the second half of this year is that the mass-produced EUV extreme ultraviolet lithography machine prototype will come out during this time.

At around 8 in the morning, Luo Sheng came to a 22,580 square meter dust-free studio in the Blue Coast Laboratory. Everyone in it was allowed to enter in dust-free clothing.

At this moment, there are more than one hundred technicians in the room, all top engineers, and more than two-thirds of them are technical experts from major companies in the domestic precision manufacturing field.

Luo Sheng used the Shengfeng Capital as the link and took the lithography machine as the core to soften this force together five years ago to launch a five-year battle against a target. The collective death lasted five years.

Without the financial support of Shengfeng Capital and the technical support of the Blue Coast, this team would not be able to form, let alone smash a technical node together.

"Mr Luo is here!"

"Manager Luo."

"Mr. Luo early."

Everyone stopped communicating when they saw or heard this, and they all looked at Luo Sheng who appeared here, and everyone respected him.

The lithography machine module is too complicated, with tens of thousands of precision components, which means that a huge industrial chain is needed for coordination, and long-term capital support is required and the risk of losing money is assumed.

This is almost impossible to do, but Luo Sheng has given all those who focus on this field and want to achieve something and break the ASML monopoly to see hope, and now is the future.

In fact, in 2006, the world's first EUV lithography machine prototype was born, which was launched by ASML, and the first R&D prototype NXE3100 was built in 2010. Luo Sheng initiated the research and development of domestic EUV lithography machine this year. In the first year of this year, this technical pain point began to die.

And this year, according to reports from foreign media, ASML finally produced a mass-produced prototype in 2015. During this research and development process, the blood transfusions of major semiconductor manufacturers such as Intel, Samsung, and Semiconductor Semiconductor are absolutely not Less.

However, the research and development of domestic EUV lithography machine is almost supported by Luo Sheng alone on the issue of blood transfusion. Only with this courage, no second person would dare to do so, because the funds invested are huge.

Everyone gave way to Luo Sheng. He came to a transparent glass partition wall and stood, looking at the scene inside the partition wall. At this moment, a sophisticated device is being modularly assembled under the operation of dozens of workers.

"Art of this size is the best compliment to capital. It cost me five years to burn more than 600 billion yuan to enter." Luo Sheng muttered while looking at the scene inside. He is quite satisfied with the development progress.

In the past five years, in order to build domestic EUV extreme ultraviolet lithography equipment, it has invested 20 billion U.S. dollars every year. So far, about 100 billion U.S. dollars. This money is funded by Blue Coast and Shengfeng Capital. Third party.

Luo Sheng paid for the technology, and other business partners allocated a sum of investment funds and related technologies based on their fields and began to smash around this industrial chain. Companies that can join this team are basically doing practical things.

Of course, there are also money scammers. Over the past five years, more than a dozen manufacturers have defrauded Luo Sheng for dozens of dollars. The money is considered to be completely squandered, but these manufacturers have also been kicked out, and others have been sentenced.

This kind of risk is within Luo Sheng's acceptable range, and he would not really expect that there will be no bad guys in the team. I am not afraid of bad guys. I am afraid that there are bad guys that have not been found out, but the current team is clean.

They may all have their own little nines and nines. Luo Sheng does not expect them to have the lofty ideal of selflessly dedicated to the cause. This is also an unrealistic utopian idea.

But it doesn't matter, just maintain the market and common interests, and if you get the vested interest, you will do your best for this interest.

A technical person in charge from a friend in the room walked to Luo Sheng, "Mr. Luo, the main performance indicators of the lithography machine, support the size range, resolution, alignment accuracy, exposure method, light source wavelength, light Technical pain points such as strong uniformity and production efficiency have now been resolved."

Luo Sheng nodded and asked, "What about the technical problems of the light source system?"

The other party immediately replied: "It's basically solved."

Luo Sheng: "Basically? That is, it hasn't been completely solved yet, so it's solved as soon as possible."

It is worth mentioning that the composition of the EUV light source system. The light source consists of three units: light generation, light collection, spectrum purification and homogenization, and related working components mainly include high-power CO2, lasers, and multilayer coatings. The mirror, the load, the light collector, the mask, and the projection optical system form plasma, and the plasma uses the multilayer mirror to reflect and purify the energy spectrum to obtain 13.5 nm EUV light.

The problem of just such a light source involves more than a dozen manufacturers to research and develop supporting equipment, which shows that the manufacturing of this thing is very difficult. Just spending enough money is secondary. Technology is even more important. Domestic related manufacturers actually There is no core technology.

But fortunately, Luo Sheng's own technology obtained the corresponding technology through Xiaona's complementary simulation for EUV lithography machine, and then distributed the technology to major manufacturers to manufacture according to the standard, and also authorized the technology to them.

It is precisely because of this technology authorization that the major manufacturers can be kept together.

Rely on consciousness and ideals?

Although Luo Sheng liked to say that, he never did it.

Otherwise, with such a complicated chain, once the manufacturers in a certain link are stunned, this is something that Luo Sheng cannot allow. The capital cost, time cost, and sunk cost are all astronomical, and they must be given a little. Hold constraints, otherwise the team will not be able to lead.

The name of the extreme ultraviolet lithography machine has already been determined, and the code is "Purple Star Lithography Machine", which is also the most advanced lithography machine equipment developed independently by China at that time without relying on foreign technology.

The advent of the purple star lithography machine will announce that the domestic lithography machine equipment and the EUV lithography machine under ASML are in the same echelon, completely breaking the monopoly of the top lithography machine equipment by foreigners.

Luo Sheng regained his gaze and looked at the technical experts sent by the major manufacturers present at the scene: "The purple star lithography machine can use extreme ultraviolet light with a wavelength of 13.5 nanometers to achieve 14 nanometer, 10 nanometer, and 7 nanometer process chips. Production, and through the iterative upgrade of technology, in the future, chip production of 9nm, 8nm, 6nm, 5nm, 4nm and even 3nm can also be achieved."

"Technology upgrade plans are being done by the Blue Coast Lab. The upgrade iterations must be coordinated. When necessary, the major supply chain partners can come to me to authorize and distribute the technology. After you go back, bring the words to your boss. I will not contact them one by one."

Everyone nodded again and again. This model simply puts R&D on the theoretical side, and the Riviera Lab is doing this.

The supply chain partners are responsible for realizing Luo Sheng's idea, which is to make the real object according to the standard. No one is more difficult to say, it is difficult, but creativity is relatively difficult.

You know, if you hand over these technologies to the third brother next door, and let them copy them, you still need to have the foundation to make physical equipment according to the standards. This is the foundation of the manufacturing industry.

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