Rewriting the Technological Scenario

On December 11, 2001, Changchun Laboratory in Shanghai will perform an exposure system experiment.

I have repeatedly mentioned that the two most important things of the momentary moment is the lens and light source. Today, the purpose of this experiment is not to say directly to the lens source. This is impossible, and the topical combination is established. For half a year, the big joining the country's project is more than two months.

Even in 2001, the technical attack is much easier than 2019, but it will not be so fast. Today, the purpose of this experiment is to further prove that the development direction of the immersion lightning machine is correct.

Previously the Jikai's allegation has the feasibility of immersion lightning machine, but more is theoretical conclusion.

This is good than Lin Benjian with theory to find Nikon, people do not take care of him, theory is the theory, or need to rise to actual use.

Therefore, the purpose of this experiment is to further prove the direction of the direction, you can give you more confidence, immersion photolithography can break through the bottleneck of the entire illuminating machine industry, to engage in the country and neon people. If this thing is really feasible, it is extremely significant for researchers in Huaxia.

On this basis, you can more assured into greater financial resources and energy, especially if you want to invest more.

At 9 o'clock in the morning, in the Changchun Laboratory, there is a thing that looks significantly more than the lightning machine. Further verification research direction The correctness of the research direction and the maximum difference between a photolithography is that there is no need to complete the photolithography behavior of the chip, just need to capture some data smoothly.

This difference will bring huge differences on the equipment. For example, in terms of precision machinery, the experiment does not need to reach the nano-stage automation machinery level, you even took the handheld.

But some things still require, such as the quality of the light source.

At 9 o'clock, the experiment is ready to start, Meng Qian continues to look at Xu Guohua's notebook.

Xu Guohua's notebook recorded more than just his experience, he said with Meng Qian to see his own notebook can help himself, because the above has recorded his so many years of technology accumulation.

It is like after he participated in the company's lightning machine project ...

"September 19, 2001

There are three methods for lifting the resolution of the photolithography, shorten the wavelength, add numerical aperture, and reduce the K1 factor. For some time, the immersion lightning machine concept brought by Jiang Da can greatly improve the refractive index, thereby increasing numerical aperture.

In order to better cooperate with the new immersion photolithography concept, we work with Changluo to achieve a huge breakthrough on the laser.

We have developed a high-power 193 nm excimer laser using fluorine gas, argon, and helium mixed gas as a working medium, which can output ARF maximum pulsed laser energy of 424 millioxers, and the total power is substantially stable in 1%. The laser is made of a glass steel cylinder of 8.4 cm inner diameter, a total length of 94 cm.

The electrode is used as a homogenous surface electrode, and the electrode is effective in width of 5 mm, and the electrode is 80 cm, and the two electrodes are 2.1 cm. "

Changchun Labs at this time.

"Wang Academician, the power supply system is ready."

"Start experiment."

...

"November 17, 2001, sunny.

The joining of Wang's academician has increased the team confidence, more than 30 researchers continuously, finally achieved results in the stability of beam stability.

The beam stabilization system includes a beam measurement and a beam steering two core functional modules, after deriving the beam transfer matrix between the two modules, the king's session is very bold to build a photoclast loop control system, by introducing a known beam After the offset, the data shows that the pointer of the system is less than ± 3μRAD, and the positional steady state error is less than ± 0.04mm, and the system adjustment time is less than 80ms.

The experimental results are exciting. "

"November 28, 2001, sunny.

The enlarged system team formed by Changluo and Jiangda brought good news. The new design system can satisfy the beam without the need for lens intervals in the 5-20M transmission optical path, realizing the size of the spot and the devastating angle to meet the design. Requirements, ensuring that the target beam diameter is in the range of (28. 5 ± 0.5) mm, the X direction is 1. 2 MRAD, and the Y direction is 1. 84 MRAD.

This study will have a huge impact on the R & D of the illuminating machine. "

Changchun Labs at this time.

"Wang Academician, the source of light source is stable, the spot data is normal."

"Open the sunscreen."

"Yes."

...

"December 1, 2001, sunny.

Today, Professor Li, Professor Li, proposed a cutting-edge study, and two methods for achieving high-uniform lighting on mask surfaces based on the excimer and the complexion of the mask.

For the randomness of the volatility and intensity distribution of the incident molecular laser intensity, the alignment and consistency of the beam using an array type illumination mode conversion element is proposed to achieve the symmetry and consistency of the pupils in various illumination modes.

The effects of various error sources that may exist on coherent factors, pupil elliptical, pupil balance, and telecenesis in coherent factor adjustment systems are studied. "

"December 5, 2001, sunny.

Tsinghua, Yanhang, and Changuang have developed a new diffractive optical component, which greatly reduces the impact of stray light, and the new algorithm will provide strong technical support for our self-developed lightning machine. "

Changchun Labs at this time.

"Wang Academician can be collected in data."

"let's start."

"Yes."

...

"January 8, 2001, sunny.

This is a far-reaching day, and the high-numeric aperture and minimal system wavefronts have always been the biggest difficulty in the field of photolithography.

Now, we are expected to break through this technology difficulties. Although this component is basically customized in neon countries, the self-research of downstream components is only a time problem. "

...

Through Xu Guohua's notebook, Meng Qian basically understands the R & D situation and main achievements of the illuminating machine project. Although only half a year, it is not possible to achieve more comprehensive self-research, but a breakthrough in another core technology is The best way of research in Huaxia scientific research,

The core technology of the photolithography machine is too much. The light is a patent involved in the exposure system. It has been in that world. These core technologies are basically nothing to do with Huaxia.

But now, on the land of Huaxia, research power is rooting root in the field of illuminating machine.

The large bone of the light moment is at a little bit of scientific research personnel.

This is just a half year achievement. After a year, two years later, after five years?

Meng Qian rolled, once, he didn't have the opportunity to witness the strength of the old generation of Chinese generation, this world, he is lucky, you can witness.

At noon, the people who have a meal, Meng Qian carefully put Xu Guohua's notebook back into the drawer.

"How many times?" This is Xu Guohua asking this question today.

"11:30." Meng Qian opened the banker, "At least you can get the result, Teacher Xu is patient and so on."

After lunch, Meng Qian fi, I didn't sleep in the night, three o'clock in the afternoon, because I was woken up by the nurse, Meng Qian simply washed the face. Waiting.

At five o'clock in the evening, Meng Qian and Xu Guowa finally waited for two winds of fire.

"Meng Zheng, Lao Xu!" Liang Zhiguo entered the door, and his face was full of answers.

Meng Qian suspended a day of heart finally put down, "Teacher Liang said the specific situation."

Liang Zhiguo sat next to the bed, a face, "The direction of the immersion photolithography should really have no mistake, and from today's experimental data analysis, the immersion photolithography machine is likely to push the momentum process forward. 3-4 generation! "

Xu Guohua is shocked, Meng Qian is shocked by shocking, "What is the next R & D plan?"

"Excavation!"

"Well? What do you mean?" Meng Qian is not very understanding Liang Zhi's meaning.

Liang Zhioguo explained that "We now put the strength of the integrated", but this also exposes our talent in some aspects, too much in the field of lightning machine, although it is impossible to be self-developed, But several relative core areas we can't let go.

Therefore, for some of the core areas of some talents, it is now nothing to cultivate from beginning to start, and can only rely on people. "

"How do you plan to dig?"

"We have sorted out alumni resources in major universities, and these blank areas have some corresponding talents abroad."

Meng Qian understood the meaning of Liang Zhi, "But they have to return to China to return to China, call back?"

"If you use it, you will naturally come back."

Meng Qian nod, Liang Zhiguo said so, he didn't question, "Yes, there is a thing Liang teacher remember to do it."

"what?"

"apply for patent."

"Reassured, our research has applied for patents."

"Not only is our research, but around our research, the patents I can apply, I want to find someone else want to figure out any illuminable machine, just want to use water to get my nod!"

"Amount ..." Liang Zhi is opposite Zhu Weijun, "Mumbai, isn't this ... Is it ... Do you do technical rogue?"

"Yeah, the main opponent after you will be a hooligan, compete with rogue, can't tell him about it. He can tell the ghost.

Despite the rogue, I am a boss, in the future, I have to be embarrassed, just like me, anyway, I don't care. "

Liang Zhiguo and Zhu Weijun regarded an eye, after using his eyes, and finally decided to do it according to Meng Qian.

At this moment, there was a footsteps outside the door, and Liang Zhiguo's students took a few dishes and three bottles of two-pot head.

Liang Zhiguo took a drink, laughed, "No matter what to say, today is a big day, whole point?"

"Okay." Meng Qian did not refuse.

Just Xu Guohua, a face, "Lao Liang, do you deliberately?"

"Hahaha, you drink it for you."

Although the surface performance is still calm, in fact, the hearts of the four people are strong, and this wine is a little drinking.

In the evening, Liang Zhiki's student stayed with Xu Guohua, and the three people went back to the hotel to rest.

Xu Guohua is naturally a little bit of wine, and when the students of Liang Zhiguo gave them three people, took out the notebook in the drawer and wrote it with a pen.

"December 12, 2001, sunny.

my country's lightning machine has achieved a breakthrough in cross time ... "

...